Browsing by Subject Accelerometers
Showing results 1 to 2 of 2
| Issue Date | Title | Author(s) |
|---|---|---|
| 2015 | A Bulk-Micromachined Three-Axis Capacitive MEMS Accelerometer on a Single Die | Tez, Serdar. ; Aykutlu, U.; Torunbalci, M.M.; Akin, T. |
| 2017 | A novel method for fabricating MEMS three-axis accelerometers using low temperature Au-Sn eutectic bonding | Tez, Serdar ; Torunbalci, M.M.; Akin, T. |