Browsing by Author Torunbalci, M.M.

Showing results 1 to 2 of 2
Issue DateTitleAuthor(s)
2015A Bulk-Micromachined Three-Axis Capacitive MEMS Accelerometer on a Single DieTez, Serdar. ; Aykutlu, U.; Torunbalci, M.M.; Akin, T. 
2017A novel method for fabricating MEMS three-axis accelerometers using low temperature Au-Sn eutectic bondingTez, Serdar ; Torunbalci, M.M.; Akin, T.