T. Akin
Akin, Taylan.
Akın, T.
T. Akın
Akın, Taylan.
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Author
Subject
- 1 Application specific integrated circuits
- 1 Capacitive accelerometers
- 1 Capacitive microelectromechanical systems (MEMS)
- 1 Deep Reactive Ion Etching
- 1 Differential accelerometers
- 1 double glass modified silicon on glass (DGM-SOG)
- 1 Electromechanical devices
- 1 Electron beam lithography
- 1 Fabrication process
- 1 Floors
- . next >
Date issued
- 1 2015
Type
- 1 Article
Fulltext
Results 1-1 of 1 (Search time: 0.003 seconds).
Issue Date | Title | Author(s) | |
---|---|---|---|
1 | 2015 | A Bulk-Micromachined Three-Axis Capacitive MEMS Accelerometer on a Single Die | Tez, Serdar. ; Aykutlu, U.; Torunbalci, M.M.; Akin, T. |
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