Please use this identifier to cite or link to this item: https://hdl.handle.net/11499/37361
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dc.contributor.authorTez, Serdar-
dc.contributor.authorAytaşkın, E.-
dc.date.accessioned2021-02-02T09:25:27Z
dc.date.available2021-02-02T09:25:27Z
dc.date.issued2020-
dc.identifier.issn2619-9831-
dc.identifier.urihttps://hdl.handle.net/11499/37361-
dc.identifier.urihttps://doi.org/10.5152/ELECTRICA.2020.19054-
dc.description.abstractThe present study introduces a microelectromechanical systems (MEMS) capacitive comb-finger resonator designed for the detection of different target analytes by using the detection mechanism based on the resonance frequency shift. This kind of applications is generally needed for a sensing layer capable of absorbing the desired target species in a molecular level, resulting in a change in the mass of the resonator. Therefore, a conceptual fabrication model is also described to form such a layer on the sensor. The dimension of the designed resonator structure is nearly 1766 µm×1998 µm, and the structural thickness of the sensor is planned to be 35 µm thick. Moreover, the design values of rest capacitance and resonance frequency of the structure are nearly 1 pF and 49 kHz, respectively. The inverse of the mass responsivity of the design given in the study is calculated as 370 pg/Hz. In addition to theoretical calculations, the mechanical and electrical simulations are also performed to verify the results. © 2020 Istanbul University. All rights reserved.en_US
dc.language.isoenen_US
dc.publisherIstanbul Universityen_US
dc.relation.ispartofElectricaen_US
dc.rightsinfo:eu-repo/semantics/openAccessen_US
dc.subjectCapacitive resonatoren_US
dc.subjectFinite element method (FEM)en_US
dc.subjectMicroelectromechanical systems (MEMS)en_US
dc.subjectResonance frequency shiften_US
dc.subjectSensoren_US
dc.subjectElectromechanical devicesen_US
dc.subjectMEMSen_US
dc.subjectNatural frequenciesen_US
dc.subjectResonatorsen_US
dc.subjectCapacitive resonatorsen_US
dc.subjectDetection mechanismen_US
dc.subjectMechanical and electricalen_US
dc.subjectMicro electromechanical system (MEMS)en_US
dc.subjectResonance frequenciesen_US
dc.subjectResonator structuresen_US
dc.subjectTheoretical calculationsen_US
dc.subjectStructural designen_US
dc.titleDesign of a MEMS-based capacitive resonator for target analyte detectionen_US
dc.typeArticleen_US
dc.identifier.volume20en_US
dc.identifier.issue1en_US
dc.identifier.startpage41
dc.identifier.startpage41en_US
dc.identifier.endpage51en_US
dc.identifier.doi10.5152/ELECTRICA.2020.19054-
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US
dc.identifier.scopus2-s2.0-85086182002en_US
dc.identifier.trdizinid426912en_US
dc.identifier.wosWOS:000518150600005en_US
dc.identifier.scopusqualityQ1-
dc.ownerPamukkale University-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.openairetypeArticle-
item.cerifentitytypePublications-
item.fulltextWith Fulltext-
item.grantfulltextopen-
item.languageiso639-1en-
crisitem.author.dept10.04. Electrical-Electronics Engineering-
Appears in Collections:Mühendislik Fakültesi Koleksiyonu
Scopus İndeksli Yayınlar Koleksiyonu / Scopus Indexed Publications Collection
TR Dizin İndeksli Yayınlar Koleksiyonu / TR Dizin Indexed Publications Collection
WoS İndeksli Yayınlar Koleksiyonu / WoS Indexed Publications Collection
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