Frequency Response Analysis of MEMS Comb-Drive Resonator Integrated With a Polymer Thin Film Layer

Abstract

This paper presents a finite element method (FEM) simulation study for micro-electro-mechanical systems capacitive comb-finger resonator. The designed resonator is conceptually integrated with a 0.75 µm-thick sensing layer poly(3,4-ethylenedioxythiophene), which is necessary to detect volatile organic chemicals (VOCs). The rest capacitance and resonance frequency values are determined with FEM simulations for coated and uncoated devices. Moreover, the conductance and the equivalent parallel capacitance of the sensors are examined with respect to the frequency by considering variables such as the quality factor and applied potential. The die size of the designed resonator is approximately 1770 µm × 2000 µm × 35 µm, and the theoretically calculated mass responsivity of the resonator is nearly 8.8 pg/Hz. We think that the proposed resonator structure can have potential use in the detection of VOCs. © 2024 Istanbul University. All rights reserved.